Problem stsetch SNF 2005-07-27 06:23:55: wafer crack

me342d at snf.stanford.edu me342d at snf.stanford.edu
Wed Jul 27 06:23:55 PDT 2005


Wafer cracked during processing but didn't shatter.  I was unable to tell the wafer was broken until I unloaded it from the chamber.  I was using the holder and had another wafer underneath since this was a through-wafer etch.  




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