Problem stsetch SNF 2005-07-27 06:23:55: wafer crack

eenriquez at snf.stanford.edu eenriquez at snf.stanford.edu
Wed Jul 27 07:57:14 PDT 2005


I don't believe the wafer holder was designed to hold two wafers at the same time. The top wafer might over heat because the backside helium cooling will not be as effective through the double wafers.




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