Problem stsetch SNF 2005-06-15 22:56:06: Etching of backside

zappe at snf.stanford.edu zappe at snf.stanford.edu
Wed Jun 15 22:56:07 PDT 2005


The wafer and the sealing ring on the chuck are not centered with respect to each other.  With the main flat oriented to the right, there seems to be a gas leak and the backside of the wafer is etched at locations close to sealing ring.  Pressure and He flow seem to be normal, though.   




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