Problem stsetch SNF 2005-06-15 22:56:06: Etching of backside

cbaxter at snf.stanford.edu cbaxter at snf.stanford.edu
Wed Jun 15 23:12:43 PDT 2005

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loaded a dummy wafer and checked clamping, it looks
normal and backside he leak 2.1sccm which is good.

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