Problem stsetch SNF 2005-06-20 22:52:52: silicon etch rate down; resist etch rate up

cbaxter at cbaxter at
Mon Jun 20 23:49:17 PDT 2005

chamber leak rate is good @0.78mt per which is good
checked chiller is @18C. process pressure is running high
(55mt etch/25mt pass, normal is 45mt/18mt). suspect foreline
below the turbo has to much depisition. foreline will to be 
removed and cleaned. 

More information about the stsetch-pcs mailing list