Problem stsetch SNF 2005-06-20 22:52:52: silicon etch rate down; resist etch rate up

cbaxter at snf.stanford.edu cbaxter at snf.stanford.edu
Mon Jun 20 23:49:17 PDT 2005


chamber leak rate is good @0.78mt per which is good
checked chiller is @18C. process pressure is running high
(55mt etch/25mt pass, normal is 45mt/18mt). suspect foreline
below the turbo has to much depisition. foreline will to be 
removed and cleaned. 




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