Problem stsetch SNF 2005-06-20 23:52:30: Etch rates are off

cbaxter at snf.stanford.edu cbaxter at snf.stanford.edu
Mon Jun 20 23:52:31 PDT 2005


Due to high pressure, etch rates are not normal. 
Users measured a wafer with low exposed area
at 5 micron/min, and another user measures 0.5 
micron/min with wafer having high exposed area. 
Will schedule foreline system maintenance for tomorrow
(Tuesday eve).
 




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