Comment stsetch SNF 2005-06-21 16:29:36: Etch rates during run were ok for my feature size

crichter at snf.stanford.edu crichter at snf.stanford.edu
Tue Jun 21 16:29:37 PDT 2005


My features are about 300 microns by 1mm long. The etch rates were at 1.18-1.4 microns/min.




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