Shutdown stsetch SNF 2005-06-29 16:17:07: Deposition on backside of the wafer

eenriquez at snf.stanford.edu eenriquez at snf.stanford.edu
Wed Jun 29 16:17:07 PDT 2005


Users need to check if the platten power generator is set on the proper range for their process.  For example; the Deep recipe calls for 120 watts of platten power, the generator must be on the 300 watt range.  The amb_ber1 recipe calls for 10 watts of platten power, the generator needs to be set at the 30 watt range.




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