Shutdown stsetch SNF 2005-06-29 16:17:07: Deposition on backside of the wafer
eenriquez at snf.stanford.edu
eenriquez at snf.stanford.edu
Wed Jun 29 16:17:07 PDT 2005
Users need to check if the platten power generator is set on the proper range for their process. For example; the Deep recipe calls for 120 watts of platten power, the generator must be on the 300 watt range. The amb_ber1 recipe calls for 10 watts of platten power, the generator needs to be set at the 30 watt range.
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