Shutdown stsetch SNF 2005-06-29 17:52:27: still residue mark on back of the wafer

cbaxter at snf.stanford.edu cbaxter at snf.stanford.edu
Wed Jun 29 20:43:26 PDT 2005


vented chamber and cleaned lower electrode, ceramic 
insulator and installed new lip seal oring. also, with eric's help
we cleaned the foreline below the turbo and installed new
foreline pipe that elmer made. we ran a 30mins o2 clean
and checked the back of the wafer and  it was clean .




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