June 2005 Archives by subject

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Starting: Wed Jun 15 22:56:07 PDT 2005
Ending: Wed Jun 29 20:43:26 PDT 2005
Messages: 19

• Comment stsetch SNF 2005-06-21 16:29:36: Etch rates during run were ok for my feature size   crichter at snf.stanford.edu
• Comment stsetch SNF 2005-06-21 21:57:48: problem fixed   hra at snf.stanford.edu
• Comment stsetch SNF 2005-06-21 21:57:48: problem fixed   cbaxter at snf.stanford.edu
• Problem stsetch SNF 2005-06-15 22:56:06: Etching of backside   zappe at snf.stanford.edu
• Problem stsetch SNF 2005-06-15 22:56:06: Etching of backside   cbaxter at snf.stanford.edu
• Problem stsetch SNF 2005-06-20 16:01:43: software locked up   hopcroft at snf.stanford.edu
• Problem stsetch SNF 2005-06-20 16:01:43: software locked up   cbaxter at snf.stanford.edu
• Problem stsetch SNF 2005-06-20 22:52:52: silicon etch rate down; resist etch rate up   bchui at snf.stanford.edu
• Problem stsetch SNF 2005-06-20 22:52:52: silicon etch rate down; resist etch rate up   cbaxter at snf.stanford.edu
• Problem stsetch SNF 2005-06-20 23:52:30: Etch rates are off   cbaxter at snf.stanford.edu
• Problem stsetch SNF 2005-06-20 23:52:30: Etch rates are off   cbaxter at snf.stanford.edu
• Problem stsetch SNF 2005-06-21 21:37:24: wafer stuck in STS chamber 21:30   hra at snf.stanford.edu
• Problem stsetch SNF 2005-06-21 21:37:24: wafer stuck in STS chamber 21:30   cbaxter at snf.stanford.edu
• Shutdown stsetch SNF 2005-06-17 09:44:33: System not powering up   eenriquez at snf.stanford.edu
• Shutdown stsetch SNF 2005-06-17 09:44:33: System not powering up   eenriquez at snf.stanford.edu
• Shutdown stsetch SNF 2005-06-29 16:17:07: Deposition on backside of the wafer   eenriquez at snf.stanford.edu
• Shutdown stsetch SNF 2005-06-29 16:17:07: Deposition on backside of the wafer   cbaxter at snf.stanford.edu
• Shutdown stsetch SNF 2005-06-29 17:52:27: still residue mark on back of the wafer   cbaxter at snf.stanford.edu
• Shutdown stsetch SNF 2005-06-29 17:52:27: still residue mark on back of the wafer   cbaxter at snf.stanford.edu

Last message date: Wed Jun 29 20:43:26 PDT 2005
Archived on: Fri Jan 11 13:11:14 PST 2013

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