From amyers at snf.stanford.edu Thu Mar 3 12:25:18 2005 From: amyers at snf.stanford.edu (amyers at snf.stanford.edu) Date: Thu, 3 Mar 2005 12:25:18 -0800 Subject: Problem stsetch SNF 2005-03-03 12:24:59: load arm is having trouble making it into Message-ID: the chamber From cbaxter at snf.stanford.edu Thu Mar 3 16:25:57 2005 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Thu, 3 Mar 2005 16:25:57 -0800 Subject: Problem stsetch SNF 2005-03-03 12:24:59: load arm is having trouble making it into Message-ID: initialize load arm From yetao at snf.stanford.edu Thu Mar 10 13:03:48 2005 From: yetao at snf.stanford.edu (yetao at snf.stanford.edu) Date: Thu, 10 Mar 2005 13:03:48 -0800 Subject: Problem stsetch SNF 2005-03-10 13:03:47: wafer transfer stage has problem going in Message-ID: coming out is OK From cbaxter at snf.stanford.edu Thu Mar 10 17:55:40 2005 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Thu, 10 Mar 2005 17:55:40 -0800 Subject: Shutdown stsetch SNF 2005-03-10 17:55:39: need to work on the load arm Message-ID: From cbaxter at snf.stanford.edu Thu Mar 10 19:43:28 2005 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Thu, 10 Mar 2005 19:43:28 -0800 Subject: Shutdown stsetch SNF 2005-03-10 17:55:39: need to work on the load arm Message-ID: cleaned and align guide shaft. From cbaxter at snf.stanford.edu Thu Mar 10 19:43:40 2005 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Thu, 10 Mar 2005 19:43:40 -0800 Subject: Problem stsetch SNF 2005-03-10 13:03:47: wafer transfer stage has problem going in Message-ID: From cbaxter at snf.stanford.edu Thu Mar 10 19:43:47 2005 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Thu, 10 Mar 2005 19:43:47 -0800 Subject: Comment stsetch SNF 2005-02-28 12:08:09: Wafers are sitting off-centered on the chuck Message-ID: From ankurjn at snf.stanford.edu Sat Mar 12 13:46:53 2005 From: ankurjn at snf.stanford.edu (ankurjn at snf.stanford.edu) Date: Sat, 12 Mar 2005 13:46:53 -0800 Subject: Shutdown stsetch SNF 2005-03-12 13:46:53: wafer broke inside chamber Message-ID: A small wafer is still in, though away from chuck. Doing a shutdown. From ericp at snf.stanford.edu Sat Mar 12 19:05:01 2005 From: ericp at snf.stanford.edu (ericp at snf.stanford.edu) Date: Sat, 12 Mar 2005 19:05:01 -0800 Subject: Comment stsetch SNF 2005-03-12 19:05:00: Piece removed, machine ok Message-ID: I removed the broken wafer piece, changed the lip seal, and changed the chamber top o-ring. The top o-ring was bad. (Old lip seal may still be usable, I'm leaving it in the STS cart.). Chamber cleaned and wiped. WILL NEED O2CLEAN and SEASONING before use. Leakup is <1.5 mT/min (only shortly after vent and IPA wipe of ceramic). From eap at gloworm.Stanford.EDU Sat Mar 12 19:10:44 2005 From: eap at gloworm.Stanford.EDU (Eric Perozziello) Date: Sat, 12 Mar 2005 19:10:44 -0800 (PST) Subject: STS etch parts Message-ID: After removing the broken piece, I noticed that we might need more spare parts on hand: Part Part Number Supplier * Plastic hats for screws in chamber (none left. will be needed soon): plastic caps for clamp screws 111291E02 * Only 1 spare lid seal left after I just replaced: chamber lid seal 382 Bay Seal, Hayward (alternate number: E08006) * I didn't notice how many lip seals left, but I used one: 100 mm lip seal DT317190.01 STS (old number appears to be 112173D02) Thanks, -Eric From cbaxter at snf.stanford.edu Sat Mar 12 19:57:51 2005 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Sat, 12 Mar 2005 19:57:51 -0800 Subject: Shutdown stsetch SNF 2005-03-12 13:46:53: wafer broke inside chamber Message-ID: Eric clear wafer..... From cbaxter at snf.stanford.edu Sat Mar 12 19:58:23 2005 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Sat, 12 Mar 2005 19:58:23 -0800 Subject: Comment stsetch SNF 2005-03-12 19:05:00: Piece removed, machine ok Message-ID: From yetao at snf.stanford.edu Sun Mar 13 15:47:13 2005 From: yetao at snf.stanford.edu (yetao at snf.stanford.edu) Date: Sun, 13 Mar 2005 15:47:13 -0800 Subject: Shutdown stsetch SNF 2005-03-13 15:47:12: transfer interlock fault Message-ID: doesn't go back to the initial position, can't vent the chamber. From ericp at snf.stanford.edu Sun Mar 13 18:11:19 2005 From: ericp at snf.stanford.edu (ericp at snf.stanford.edu) Date: Sun, 13 Mar 2005 18:11:19 -0800 Subject: Comment stsetch SNF 2005-03-13 18:11:19: machine ok Message-ID: It was a simple wafer handling error. It doesn't need a shutdown for that. If someone else wants to bug a staffmember on the weekend, you can get it back alive and use it. It's ready to go, if you can get a staffmember to put it back to green. From eenriquez at snf.stanford.edu Mon Mar 14 07:54:12 2005 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 14 Mar 2005 07:54:12 -0800 Subject: Shutdown stsetch SNF 2005-03-13 15:47:12: transfer interlock fault Message-ID: Looks like eric fixed the problem. Cycled wafers and ran process with problems. From eenriquez at snf.stanford.edu Mon Mar 14 07:54:23 2005 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 14 Mar 2005 07:54:23 -0800 Subject: Comment stsetch SNF 2005-03-13 18:11:19: machine ok Message-ID: Thanks eric From eenriquez at snf.stanford.edu Mon Mar 14 07:54:34 2005 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 14 Mar 2005 07:54:34 -0800 Subject: Comment stsetch SNF 2005-02-28 08:43:09: Hard drive (C:) was full Message-ID: OK From holdenli at snf.stanford.edu Sun Mar 27 12:19:43 2005 From: holdenli at snf.stanford.edu (holdenli at snf.stanford.edu) Date: Sun, 27 Mar 2005 12:19:43 -0800 Subject: Problem stsetch SNF 2005-03-27 12:19:42: Transfer Error Message-ID: Problem with loading the wafer into chamber. Error mesg is "ICP transfer mode entry failed - compressed air fault". Unable to load wafer. From eenriquez at snf.stanford.edu Mon Mar 28 07:54:29 2005 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 28 Mar 2005 07:54:29 -0800 Subject: Problem stsetch SNF 2005-03-27 12:19:42: Transfer Error Message-ID: Increased the system air pressure. Cycled the loader several times with problems. Next time it faults for the compressed air, press the "Accept" button on the process control window.