Problem stsetch SNF 2005-03-10 13:03:47: wafer transfer stage has problem going in
cbaxter at snf.stanford.edu
cbaxter at snf.stanford.edu
Thu Mar 10 19:43:40 PST 2005
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Problem stsetch SNF 2005-03-10 13:03:47: wafer transfer stage has problem going in
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Problem stsetch SNF 2005-03-10 13:03:47: wafer transfer stage has problem going in
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Shutdown stsetch SNF 2005-03-10 17:55:39: need to work on the load arm
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