Comment stsetch SNF 2005-02-28 12:08:09: Wafers are sitting off-centered on the chuck
cbaxter at snf.stanford.edu
cbaxter at snf.stanford.edu
Thu Mar 10 19:43:47 PST 2005
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Shutdown stsetch SNF 2005-03-10 17:55:39: need to work on the load arm
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Shutdown stsetch SNF 2005-03-12 13:46:53: wafer broke inside chamber
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Shutdown stsetch SNF 2005-03-10 17:55:39: need to work on the load arm
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Shutdown stsetch SNF 2005-03-12 13:46:53: wafer broke inside chamber
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