Comment stsetch SNF 2005-03-12 19:05:00: Piece removed, machine ok
ericp at snf.stanford.edu
ericp at snf.stanford.edu
Sat Mar 12 19:05:01 PST 2005
I removed the broken wafer piece, changed the lip
seal, and changed the chamber top o-ring. The top
o-ring was bad. (Old lip seal may still be usable,
I'm leaving it in the STS cart.). Chamber cleaned and
wiped. WILL NEED O2CLEAN and SEASONING
before use. Leakup is <1.5 mT/min (only shortly
after vent and IPA wipe of ceramic).
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