STS etch parts
Eric Perozziello
eap at gloworm.Stanford.EDU
Sat Mar 12 19:10:44 PST 2005
After removing the broken piece,
I noticed that we might need more spare parts on hand:
Part Part Number Supplier
* Plastic hats for screws in chamber (none left. will be needed soon):
plastic caps for clamp screws 111291E02
* Only 1 spare lid seal left after I just replaced:
chamber lid seal 382 Bay Seal, Hayward
(alternate number: E08006)
* I didn't notice how many lip seals left, but I used one:
100 mm lip seal DT317190.01 STS
(old number appears to be 112173D02)
Thanks,
-Eric
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