Shutdown stsetch SNF 2005-05-06 10:37:51: Wafer pieces inside chamber

eenriquez at snf.stanford.edu eenriquez at snf.stanford.edu
Fri May 6 13:31:30 PDT 2005


The wafer was too thin and was broken by the backside He pressure.  Cleaned chamber and ran 30 min O2 clean.




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