Problem stsetch SNF 2005-05-10 22:13:50: Error during process

[qchen at snf.stanford.edu]

The etching process was teminated itself with the error message " lost communation ..." and the control window was also closed.  When I clicked one of the three irons on the desktop and tried to resume the control window, I got another one which I'd never seen before. So, I gave it up and have to leave my wafer in the chamber.