Shutdown stsetch SNF 2005-05-27 12:05:01: broken wafer
eenriquez at snf.stanford.edu
eenriquez at snf.stanford.edu
Fri May 27 13:45:54 PDT 2005
Broken wafer was a bonded wafer. Cleaned chamber and load lock. Ran 30 min O2 clean
More information about the stsetch-pcs
mailing list