Shutdown stsetch SNF 2005-11-14 02:35:58: cannot load or unload the wafer
fumin at snf.stanford.edu
fumin at snf.stanford.edu
Mon Nov 14 02:35:59 PST 2005
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Shutdown stsetch SNF 2005-11-14 02:35:58: cannot load or unload the wafer
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Shutdown stsetch SNF 2005-11-03 11:35:49: compressed air fault again....
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