Shutdown stsetch SNF 2005-11-14 02:35:58: cannot load or unload the wafer

eenriquez at snf.stanford.edu eenriquez at snf.stanford.edu
Mon Nov 14 08:17:11 PST 2005


Found a large piece of paper across the loadlock o-ring.  Vented the loadlock manually, removed o-ring and loaded the user's sample into the chamber.




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