Problem stsetch SNF 2005-11-24 02:49:43: Multitude of problems

bchui at snf.stanford.edu bchui at snf.stanford.edu
Thu Nov 24 02:49:44 PST 2005


Including loadlock pumpdown timeout, chamber pumpdown error, and finally platen power error.  No platen power.




More information about the stsetch-pcs mailing list