Problem stsetch SNF 2005-11-23 19:04:30: It does not load the wafer

eenriquez at snf.stanford.edu eenriquez at snf.stanford.edu
Mon Nov 28 11:57:59 PST 2005


System keeps loosing serial communication with both the loadlock and process chamber computer.  Secured serial communication cable to the main computer. Cycled system 5 X with no problems.  Before securing the lines, the system locked-up every time I tried to run it.




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