From quickwin at snf.stanford.edu Sat Oct 8 19:00:12 2005 From: quickwin at snf.stanford.edu (quickwin at snf.stanford.edu) Date: Sat, 8 Oct 2005 19:00:12 -0700 Subject: Problem stsetch SNF 2005-10-08 19:00:12: wafer stuck inside Message-ID: Machine won't pump down to the final pressure and wafer can not be unloaded. From cbaxter at snf.stanford.edu Mon Oct 10 16:18:02 2005 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Mon, 10 Oct 2005 16:18:02 -0700 Subject: Problem stsetch SNF 2005-10-08 19:00:12: wafer stuck inside Message-ID: recovered wafer on load lock From cbaxter at snf.stanford.edu Tue Oct 11 17:19:55 2005 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Tue, 11 Oct 2005 17:19:55 -0700 Subject: Shutdown stsetch SNF 2005-10-11 17:19:55: compress air error and lost comunication. Message-ID: From cbaxter at snf.stanford.edu Tue Oct 11 17:37:21 2005 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Tue, 11 Oct 2005 17:37:21 -0700 Subject: Shutdown stsetch SNF 2005-10-11 17:19:55: compress air error and lost comunication. Message-ID: compressor switch was stuck open. bleed air and charge line back up switch release itself. reboot system, tool back to normal operation. From amin at snf.stanford.edu Tue Oct 11 19:46:31 2005 From: amin at snf.stanford.edu (amin at snf.stanford.edu) Date: Tue, 11 Oct 2005 19:46:31 -0700 Subject: Problem stsetch SNF 2005-10-11 19:46:30: Compression air fault Message-ID: After this error I could not unload my wafer and it got stuck in the machine. From cbaxter at snf.stanford.edu Tue Oct 11 21:57:05 2005 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Tue, 11 Oct 2005 21:57:05 -0700 Subject: Problem stsetch SNF 2005-10-11 19:46:30: Compression air fault Message-ID: system is been working fine. From quickwin at snf.stanford.edu Sun Oct 16 10:12:16 2005 From: quickwin at snf.stanford.edu (quickwin at snf.stanford.edu) Date: Sun, 16 Oct 2005 10:12:16 -0700 Subject: Problem stsetch SNF 2005-10-16 10:12:15: compressed air fault Message-ID: This fault happened twice over a three hour period. Etch result is affected by the fault in one case. From bchui at snf.stanford.edu Sun Oct 16 23:55:00 2005 From: bchui at snf.stanford.edu (bchui at snf.stanford.edu) Date: Sun, 16 Oct 2005 23:55:00 -0700 Subject: Problem stsetch SNF 2005-10-16 23:54:59: Same compressed air fault problem Message-ID: Tried my luck with the etching, but encountered same problem as reported by previous user within the first 10 minutes. Didn't attempt to restart the etch. From eenriquez at snf.stanford.edu Mon Oct 17 09:32:34 2005 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 17 Oct 2005 09:32:34 -0700 Subject: Problem stsetch SNF 2005-10-16 23:54:59: Same compressed air fault problem Message-ID: Adjusted the air pressure sensor. From eenriquez at snf.stanford.edu Mon Oct 17 09:33:52 2005 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 17 Oct 2005 09:33:52 -0700 Subject: Problem stsetch SNF 2005-10-16 10:12:15: compressed air fault Message-ID: Adjusted air pressure sensor. From amin at snf.stanford.edu Wed Oct 19 01:22:31 2005 From: amin at snf.stanford.edu (amin at snf.stanford.edu) Date: Wed, 19 Oct 2005 01:22:31 -0700 Subject: Problem stsetch SNF 2005-10-19 01:22:30: Wafer in the machine Message-ID: My wafer is stuck in the machine. It was working fine but after the process was done when I hit "Unload" it did not unloaded my wafer. From eenriquez at snf.stanford.edu Wed Oct 19 09:25:45 2005 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 19 Oct 2005 09:25:45 -0700 Subject: Problem stsetch SNF 2005-10-19 01:22:30: Wafer in the machine Message-ID: System controller had a communication error (watchdog time out). Reset the system and computer. From eenriquez at snf.stanford.edu Wed Oct 19 09:36:27 2005 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 19 Oct 2005 09:36:27 -0700 Subject: Shutdown stsetch SNF 2005-10-19 09:36:27: Broken wafer Message-ID: From eenriquez at snf.stanford.edu Wed Oct 19 11:19:53 2005 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 19 Oct 2005 11:19:53 -0700 Subject: Shutdown stsetch SNF 2005-10-19 09:36:27: Broken wafer Message-ID: Bonded wafer delaminated in the process chamber during loading. Vented chamber and cleaned broken wafer pieces. Also replaced 10 cap screw covers. Ran 20 minute O2 clean. From bchui at snf.stanford.edu Thu Oct 20 23:29:06 2005 From: bchui at snf.stanford.edu (bchui at snf.stanford.edu) Date: Thu, 20 Oct 2005 23:29:06 -0700 Subject: Problem stsetch SNF 2005-10-20 23:29:06: Recipe editor SW glitch Message-ID: Recipe editor won't work. Probably needs SW reboot. But etching function itself is fine as long as you don't need to change the time. Also, still encounter compressed air fault occasionally. From eenriquez at snf.stanford.edu Fri Oct 21 09:30:51 2005 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 21 Oct 2005 09:30:51 -0700 Subject: Problem stsetch SNF 2005-10-20 23:29:06: Recipe editor SW glitch Message-ID: The "Deep" recipe had been corrupted. Deleted and then re-created the recipe. Ran the recipe with no problems. Also adjusted the cda pressure switch. From oday at snf.stanford.edu Sat Oct 22 04:28:08 2005 From: oday at snf.stanford.edu (oday at snf.stanford.edu) Date: Sat, 22 Oct 2005 04:28:08 -0700 Subject: Shutdown stsetch SNF 2005-10-22 04:28:07: wafer broke Message-ID: I came back to load a new wafer, saw "compressed air fault" So I aborted and hit unload, spatula came back covered in pieces. I don't know what happened, I've etched several identical wafers with out a problem. To all who won't be able to use the machine now, I'am very sorry that this happened, I understand the fustration I have caused, and I'm sorry. From eenriquez at snf.stanford.edu Mon Oct 24 09:22:55 2005 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 24 Oct 2005 09:22:55 -0700 Subject: Shutdown stsetch SNF 2005-10-22 04:28:07: wafer broke Message-ID: Eric P. cleaned the chamber. Adjusted the CDA bleed pressure. Cycled several wafers with no problems. From aeonia at snf.stanford.edu Tue Oct 25 16:48:47 2005 From: aeonia at snf.stanford.edu (aeonia at snf.stanford.edu) Date: Tue, 25 Oct 2005 16:48:47 -0700 Subject: Shutdown stsetch SNF 2005-10-25 16:48:47: Serial communication fault Message-ID: Serial communication fault. Needs to be reboot. From cbaxter at snf.stanford.edu Tue Oct 25 17:05:27 2005 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Tue, 25 Oct 2005 17:05:27 -0700 Subject: Shutdown stsetch SNF 2005-10-25 16:48:47: Serial communication fault Message-ID: reboot system and unload wafer inside the chamber. From xzhuan1 at snf.stanford.edu Tue Oct 25 18:33:32 2005 From: xzhuan1 at snf.stanford.edu (xzhuan1 at snf.stanford.edu) Date: Tue, 25 Oct 2005 18:33:32 -0700 Subject: Shutdown stsetch SNF 2005-10-25 18:33:32: can't uload wafer Message-ID: "unload" option not functioning in software. From eenriquez at snf.stanford.edu Wed Oct 26 08:44:57 2005 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 26 Oct 2005 08:44:57 -0700 Subject: Shutdown stsetch SNF 2005-10-25 18:33:32: can't uload wafer Message-ID: No problem found. Unloaded wafer. Cycled test wafers using Deep recipe with no problem. From quickwin at snf.stanford.edu Thu Oct 27 16:07:52 2005 From: quickwin at snf.stanford.edu (quickwin at snf.stanford.edu) Date: Thu, 27 Oct 2005 16:07:52 -0700 Subject: Problem stsetch SNF 2005-10-27 16:07:50: "serial communication fault" during etching Message-ID: My wafer got stuck inside. From cbaxter at snf.stanford.edu Thu Oct 27 18:02:47 2005 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Thu, 27 Oct 2005 18:02:47 -0700 Subject: Problem stsetch SNF 2005-10-27 16:07:50: "serial communication fault" during etching Message-ID: reboot system and unload wafer. From oday at snf.stanford.edu Fri Oct 28 10:28:17 2005 From: oday at snf.stanford.edu (oday at snf.stanford.edu) Date: Fri, 28 Oct 2005 10:28:17 -0700 Subject: Shutdown stsetch SNF 2005-10-28 10:28:17: Broken Wafer Message-ID: From cbaxter at snf.stanford.edu Fri Oct 28 17:13:50 2005 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Fri, 28 Oct 2005 17:13:50 -0700 Subject: Shutdown stsetch SNF 2005-10-28 10:28:17: Broken Wafer Message-ID: cleaned up broken wafer chips. been having compress air error. system has been reboot. From quickwin at snf.stanford.edu Sun Oct 30 14:08:43 2005 From: quickwin at snf.stanford.edu (quickwin at snf.stanford.edu) Date: Sun, 30 Oct 2005 14:08:43 -0800 Subject: Problem stsetch SNF 2005-10-30 14:08:42: "compressed air fault" still happens Message-ID: From mdr at snf.stanford.edu Sun Oct 30 23:44:46 2005 From: mdr at snf.stanford.edu (mdr at snf.stanford.edu) Date: Sun, 30 Oct 2005 23:44:46 -0800 Subject: Problem stsetch SNF 2005-10-30 23:44:46: failure Message-ID: I could not etch/unload my wafer after a communications error. From eenriquez at snf.stanford.edu Mon Oct 31 09:14:44 2005 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 31 Oct 2005 09:14:44 -0800 Subject: Problem stsetch SNF 2005-10-30 23:44:46: failure Message-ID: Lost communication with the load lock. Reset the system. Ran a test with no problems. From eenriquez at snf.stanford.edu Mon Oct 31 09:20:27 2005 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 31 Oct 2005 09:20:27 -0800 Subject: Problem stsetch SNF 2005-10-30 14:08:42: "compressed air fault" still happens Message-ID: Adjusted pressure sensor.