Problem stsetch SNF 2005-10-08 19:00:12: wafer stuck inside
cbaxter at snf.stanford.edu
cbaxter at snf.stanford.edu
Mon Oct 10 16:18:02 PDT 2005
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Problem stsetch SNF 2005-10-08 19:00:12: wafer stuck inside
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Shutdown stsetch SNF 2005-10-11 17:19:55: compress air error and lost comunication.
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recovered wafer on load lock
Previous message:
Problem stsetch SNF 2005-10-08 19:00:12: wafer stuck inside
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Shutdown stsetch SNF 2005-10-11 17:19:55: compress air error and lost comunication.
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