Problem stsetch SNF 2005-10-11 19:46:30: Compression air fault

amin at snf.stanford.edu amin at snf.stanford.edu
Tue Oct 11 19:46:31 PDT 2005

Previous message: Shutdown stsetch SNF 2005-10-11 17:19:55: compress air error and lost comunication.
Next message: Problem stsetch SNF 2005-10-11 19:46:30: Compression air fault
Messages sorted by: [ date ] [ thread ] [ subject ] [ author ]

After this error I could not unload my wafer and it got stuck in the machine.

Previous message: Shutdown stsetch SNF 2005-10-11 17:19:55: compress air error and lost comunication.
Next message: Problem stsetch SNF 2005-10-11 19:46:30: Compression air fault
Messages sorted by: [ date ] [ thread ] [ subject ] [ author ]

More information about the stsetch-pcs mailing list