Problem stsetch SNF 2005-10-19 01:22:30: Wafer in the machine

amin at snf.stanford.edu amin at snf.stanford.edu
Wed Oct 19 01:22:31 PDT 2005

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My wafer is stuck in the machine. It was working fine but after the process was done when I hit "Unload" it did not unloaded my wafer.

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