Shutdown stsetch SNF 2005-10-19 09:36:27: Broken wafer

eenriquez at snf.stanford.edu eenriquez at snf.stanford.edu
Wed Oct 19 11:19:53 PDT 2005


Bonded wafer delaminated in the process chamber during loading.  Vented chamber and cleaned broken wafer pieces.  Also replaced 10 cap screw covers.  Ran 20 minute O2 clean.




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