Shutdown stsetch SNF 2005-10-19 09:36:27: Broken wafer

eenriquez at eenriquez at
Wed Oct 19 11:19:53 PDT 2005

Bonded wafer delaminated in the process chamber during loading.  Vented chamber and cleaned broken wafer pieces.  Also replaced 10 cap screw covers.  Ran 20 minute O2 clean.

More information about the stsetch-pcs mailing list