Shutdown stsetch SNF 2005-10-22 04:28:07: wafer broke

[oday at snf.stanford.edu]

I came back to load a new wafer, saw "compressed air fault"
So I aborted and hit unload,  spatula came back covered in 
pieces.  I don't know what happened, I've etched several identical wafers with out a problem.   To all who won't be able to use the machine now, I'am very sorry that this happened, I understand the fustration I have caused, and I'm sorry.