Shutdown stsetch SNF 2005-10-22 04:28:07: wafer broke

eenriquez at snf.stanford.edu eenriquez at snf.stanford.edu
Mon Oct 24 09:22:55 PDT 2005

Previous message: Shutdown stsetch SNF 2005-10-22 04:28:07: wafer broke
Next message: Shutdown stsetch SNF 2005-10-25 16:48:47: Serial communication fault
Messages sorted by: [ date ] [ thread ] [ subject ] [ author ]

Eric P. cleaned the chamber.  Adjusted the CDA bleed pressure.  Cycled several wafers with no problems.

Previous message: Shutdown stsetch SNF 2005-10-22 04:28:07: wafer broke
Next message: Shutdown stsetch SNF 2005-10-25 16:48:47: Serial communication fault
Messages sorted by: [ date ] [ thread ] [ subject ] [ author ]

More information about the stsetch-pcs mailing list