Shutdown stsetch SNF 2005-10-28 10:28:17: Broken Wafer
oday at snf.stanford.edu
oday at snf.stanford.edu
Fri Oct 28 10:28:17 PDT 2005
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Problem stsetch SNF 2005-10-27 16:07:50: "serial communication fault" during etching
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Shutdown stsetch SNF 2005-10-28 10:28:17: Broken Wafer
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Shutdown stsetch SNF 2005-10-28 10:28:17: Broken Wafer
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