From jackson at snf.stanford.edu Sun Sep 4 16:18:15 2005 From: jackson at snf.stanford.edu (jackson at snf.stanford.edu) Date: Sun, 4 Sep 2005 16:18:15 -0700 Subject: Problem stsetch SNF 2005-09-04 16:18:15: interlock error Message-ID: during cycle ... interlock tripped error and cycle stopped From eenriquez at snf.stanford.edu Tue Sep 6 09:32:44 2005 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Tue, 6 Sep 2005 09:32:44 -0700 Subject: Problem stsetch SNF 2005-09-04 16:18:15: interlock error Message-ID: Ran loaded wafer and ran Deep recipe several times with no problems. From rfasch at snf.stanford.edu Fri Sep 9 07:40:56 2005 From: rfasch at snf.stanford.edu (rfasch at snf.stanford.edu) Date: Fri, 9 Sep 2005 07:40:56 -0700 Subject: Problem stsetch SNF 2005-09-09 07:40:55: pump down error Message-ID: Hi elmar, pump down error came off and I cannot abort the process. It got stuck in pump down cycle.. Need your help. I'm in theCR. rainer From eenriquez at snf.stanford.edu Fri Sep 9 08:57:59 2005 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 9 Sep 2005 08:57:59 -0700 Subject: Problem stsetch SNF 2005-09-09 07:40:55: pump down error Message-ID: Bad recipe. Found the base pressure value in the recipe was set to 0 mT instead of 4 mT. From rfasch at snf.stanford.edu Thu Sep 15 16:12:52 2005 From: rfasch at snf.stanford.edu (rfasch at snf.stanford.edu) Date: Thu, 15 Sep 2005 16:12:52 -0700 Subject: Shutdown stsetch SNF 2005-09-15 16:12:48: wafer handler problem Message-ID: wafer handler don't communicate with system. A wafer is in the etch chamber. From cbaxter at snf.stanford.edu Thu Sep 15 20:20:10 2005 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Thu, 15 Sep 2005 20:20:10 -0700 Subject: Shutdown stsetch SNF 2005-09-15 16:12:48: wafer handler problem Message-ID: eric and i reset the tool and recovered the wafer inside the chamber. From mislam at snf.stanford.edu Wed Sep 21 13:51:43 2005 From: mislam at snf.stanford.edu (mislam at snf.stanford.edu) Date: Wed, 21 Sep 2005 13:51:43 -0700 Subject: Problem stsetch SNF 2005-09-21 13:51:36: Compressed air fault Message-ID: Run stops due to compressed air fault. From eenriquez at snf.stanford.edu Wed Sep 21 14:59:47 2005 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 21 Sep 2005 14:59:47 -0700 Subject: Problem stsetch SNF 2005-09-21 13:51:36: Compressed air fault Message-ID: Reset the cda pressure sensor by turning the cda off, releasing the pressure and then turning it back on. From latta at snf.stanford.edu Wed Sep 21 16:58:55 2005 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Wed, 21 Sep 2005 16:58:55 -0700 Subject: Shutdown stsetch SNF 2005-09-21 16:58:53: wafer in chamber Message-ID: but software doesn't see it. From cbaxter at snf.stanford.edu Wed Sep 21 19:39:31 2005 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Wed, 21 Sep 2005 19:39:31 -0700 Subject: Shutdown stsetch SNF 2005-09-21 16:58:53: wafer in chamber Message-ID: recovered wafer from chamber and hard reset system. From jasmine at snf.stanford.edu Tue Sep 27 17:29:32 2005 From: jasmine at snf.stanford.edu (jasmine at snf.stanford.edu) Date: Tue, 27 Sep 2005 17:29:32 -0700 Subject: Problem stsetch SNF 2005-09-27 17:29:31: clacking noises while loading and unloading wafers Message-ID: I heard quacking noises while unloading and loading my wafer (etch recipe: iso) From mdr at snf.stanford.edu Tue Sep 27 23:00:14 2005 From: mdr at snf.stanford.edu (mdr at snf.stanford.edu) Date: Tue, 27 Sep 2005 23:00:14 -0700 Subject: Comment stsetch SNF 2005-09-27 23:00:13: clacking Message-ID: Didn't happen on my first few etches. Then during the pumpdown cycle of my last run the transfer arm shook violently and made some noise. From eenriquez at snf.stanford.edu Wed Sep 28 10:53:40 2005 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 28 Sep 2005 10:53:40 -0700 Subject: Comment stsetch SNF 2005-09-27 23:00:13: clacking Message-ID: Unable to duplicate problem From eenriquez at snf.stanford.edu Thu Sep 29 12:26:00 2005 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Thu, 29 Sep 2005 12:26:00 -0700 Subject: Problem stsetch SNF 2005-09-27 17:29:31: clacking noises while loading and unloading wafers Message-ID: Unable to re-create problem.