Problem stsetch SNF 2005-09-21 13:51:36: Compressed air fault
mislam at snf.stanford.edu
mislam at snf.stanford.edu
Wed Sep 21 13:51:43 PDT 2005
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Shutdown stsetch SNF 2005-09-15 16:12:48: wafer handler problem
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Problem stsetch SNF 2005-09-21 13:51:36: Compressed air fault
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Run stops due to compressed air fault.
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Shutdown stsetch SNF 2005-09-15 16:12:48: wafer handler problem
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Problem stsetch SNF 2005-09-21 13:51:36: Compressed air fault
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