Problem stsetch SNF 2005-09-21 13:51:36: Compressed air fault

eenriquez at snf.stanford.edu eenriquez at snf.stanford.edu
Wed Sep 21 14:59:47 PDT 2005

Previous message: Problem stsetch SNF 2005-09-21 13:51:36: Compressed air fault
Next message: Shutdown stsetch SNF 2005-09-21 16:58:53: wafer in chamber
Messages sorted by: [ date ] [ thread ] [ subject ] [ author ]

Reset the cda pressure sensor by turning the cda off, releasing the pressure and then turning it back on.

Previous message: Problem stsetch SNF 2005-09-21 13:51:36: Compressed air fault
Next message: Shutdown stsetch SNF 2005-09-21 16:58:53: wafer in chamber
Messages sorted by: [ date ] [ thread ] [ subject ] [ author ]

More information about the stsetch-pcs mailing list