Shutdown stsetch SNF 2005-09-21 16:58:53: wafer in chamber
latta at snf.stanford.edu
latta at snf.stanford.edu
Wed Sep 21 16:58:55 PDT 2005
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Problem stsetch SNF 2005-09-21 13:51:36: Compressed air fault
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Shutdown stsetch SNF 2005-09-21 16:58:53: wafer in chamber
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but software doesn't see it.
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Problem stsetch SNF 2005-09-21 13:51:36: Compressed air fault
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Shutdown stsetch SNF 2005-09-21 16:58:53: wafer in chamber
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