From malekos at snf.stanford.edu Sat Apr 1 14:15:21 2006 From: malekos at snf.stanford.edu (malekos at snf.stanford.edu) Date: Sat, 1 Apr 2006 14:15:21 -0800 Subject: Problem stsetch SNF 2006-04-01 14:15:20: broken wafer Message-ID: Sorry Elmer!!!!! From ericp at snf.stanford.edu Sun Apr 2 23:11:32 2006 From: ericp at snf.stanford.edu (ericp at snf.stanford.edu) Date: Sun, 2 Apr 2006 23:11:32 -0700 Subject: Comment stsetch SNF 2006-04-02 23:11:31: Malekos broken wafer cleared Message-ID: Ok to remove problem on STSETCH. From ericp at snf.stanford.edu Sun Apr 2 23:12:39 2006 From: ericp at snf.stanford.edu (ericp at snf.stanford.edu) Date: Sun, 2 Apr 2006 23:12:39 -0700 Subject: Comment stsetch SNF 2006-04-02 23:12:39: LL leakup getting high Message-ID: Leakup rate on the loadlock is getting fast (~under a minute/cycle). From cbaxter at snf.stanford.edu Mon Apr 3 08:54:04 2006 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Mon, 3 Apr 2006 08:54:04 -0700 Subject: Comment stsetch SNF 2006-04-02 23:12:39: LL leakup getting high Message-ID: cleaned chamber door oring. From cbaxter at snf.stanford.edu Mon Apr 3 08:54:09 2006 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Mon, 3 Apr 2006 08:54:09 -0700 Subject: Comment stsetch SNF 2006-04-02 23:11:31: Malekos broken wafer cleared Message-ID: From cbaxter at snf.stanford.edu Mon Apr 3 08:54:26 2006 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Mon, 3 Apr 2006 08:54:26 -0700 Subject: Problem stsetch SNF 2006-04-01 14:15:20: broken wafer Message-ID: cleaned broken wafer chips From praveen at snf.stanford.edu Wed Apr 5 14:39:35 2006 From: praveen at snf.stanford.edu (praveen at snf.stanford.edu) Date: Wed, 5 Apr 2006 14:39:35 -0700 Subject: Problem stsetch SNF 2006-04-05 14:39:35: error Message-ID: ICP serial communication failure alarm, and Lock not available alarm. From cbaxter at snf.stanford.edu Wed Apr 5 15:15:09 2006 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Wed, 5 Apr 2006 15:15:09 -0700 Subject: Problem stsetch SNF 2006-04-05 14:39:35: error Message-ID: reboot pc and unload wafer on chamber. From praveen at snf.stanford.edu Thu Apr 6 12:45:56 2006 From: praveen at snf.stanford.edu (praveen at snf.stanford.edu) Date: Thu, 6 Apr 2006 12:45:56 -0700 Subject: Comment stsetch SNF 2006-04-06 12:45:55: free from 16:30 to 18:30 Message-ID: used an earlier time slot From praveen at snf.stanford.edu Fri Apr 7 11:02:46 2006 From: praveen at snf.stanford.edu (praveen at snf.stanford.edu) Date: Fri, 7 Apr 2006 11:02:46 -0700 Subject: Comment stsetch SNF 2006-04-07 11:02:17: free from 16:30 to 19:00 Message-ID: DRIE mask not ready From treviscrane at snf.stanford.edu Sun Apr 9 17:22:20 2006 From: treviscrane at snf.stanford.edu (treviscrane at snf.stanford.edu) Date: Sun, 9 Apr 2006 17:22:20 -0700 Subject: Problem stsetch SNF 2006-04-09 17:22:20: software error -- won't load wafer Message-ID: I put my wafer in and pressed load -- it wouldn't pump down and load the wafer. So there's nothing in there right now. Tried ot restart software but it couldn't restart comm. with the system. From ericp at snf.stanford.edu Sun Apr 9 19:57:39 2006 From: ericp at snf.stanford.edu (ericp at snf.stanford.edu) Date: Sun, 9 Apr 2006 19:57:39 -0700 Subject: Comment stsetch SNF 2006-04-09 19:57:39: Re: software error -- Message-ID: PLC was locked up and wouldn't communicate with ICP. Wafer cycles ok, but still get flakey errors "excessive gate close time", etc (even though the gate does in fact close in time. Machine seems to be ok to run, but is still flakey. From cbaxter at snf.stanford.edu Mon Apr 10 08:45:03 2006 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Mon, 10 Apr 2006 08:45:03 -0700 Subject: Problem stsetch SNF 2006-04-09 17:22:20: software error -- won't load wafer Message-ID: system has been rebooted. From aeonia at snf.stanford.edu Sun Apr 16 01:06:56 2006 From: aeonia at snf.stanford.edu (aeonia at snf.stanford.edu) Date: Sun, 16 Apr 2006 01:06:56 -0700 Subject: Problem stsetch SNF 2006-04-16 01:06:55: Wafer broken Message-ID: My wafer is broken in two peices. The half is still there. I was told that Elmer will come early next morning. I hope he can take care of this. I am sorry for this inconvenience. From ericp at snf.stanford.edu Sun Apr 16 01:51:02 2006 From: ericp at snf.stanford.edu (ericp at snf.stanford.edu) Date: Sun, 16 Apr 2006 01:51:02 -0700 Subject: Comment stsetch SNF 2006-04-16 01:51:01: cleared broken wafer Message-ID: I cleared the broken wafer and replaced the lip seal. From cbaxter at snf.stanford.edu Mon Apr 17 09:52:40 2006 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Mon, 17 Apr 2006 09:52:40 -0700 Subject: Problem stsetch SNF 2006-04-16 01:06:55: Wafer broken Message-ID: eric vented and cleaned the chamber. From xzhuan1 at snf.stanford.edu Sun Apr 23 18:10:20 2006 From: xzhuan1 at snf.stanford.edu (xzhuan1 at snf.stanford.edu) Date: Sun, 23 Apr 2006 18:10:20 -0700 Subject: Problem stsetch SNF 2006-04-23 18:10:19: wafer stuck in load chamber Message-ID: software crashed, cannot load or unload wafer. From xzhuan1 at snf.stanford.edu Sun Apr 23 18:35:08 2006 From: xzhuan1 at snf.stanford.edu (xzhuan1 at snf.stanford.edu) Date: Sun, 23 Apr 2006 18:35:08 -0700 Subject: Problem stsetch SNF 2006-04-23 18:35:07: load plate and beam vibrat Message-ID: for no apparent reasons, the load plate vibrates intermittently. It shock off the test wafer from the laod plate. From cbaxter at snf.stanford.edu Mon Apr 24 09:06:08 2006 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Mon, 24 Apr 2006 09:06:08 -0700 Subject: Problem stsetch SNF 2006-04-23 18:35:07: load plate and beam vibrat Message-ID: recovered wafer on load lock and home transfer arm From cbaxter at snf.stanford.edu Mon Apr 24 09:06:29 2006 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Mon, 24 Apr 2006 09:06:29 -0700 Subject: Problem stsetch SNF 2006-04-23 18:10:19: wafer stuck in load chamber Message-ID: reboot system. From foxpp at snf.stanford.edu Sat Apr 29 09:43:55 2006 From: foxpp at snf.stanford.edu (foxpp at snf.stanford.edu) Date: Sat, 29 Apr 2006 09:43:55 -0700 Subject: Problem stsetch SNF 2006-04-29 09:43:54: a wafer stuck in the chamber.Can't unload. Message-ID: From foxpp at snf.stanford.edu Sat Apr 29 18:04:05 2006 From: foxpp at snf.stanford.edu (foxpp at snf.stanford.edu) Date: Sat, 29 Apr 2006 18:04:05 -0700 Subject: Comment stsetch SNF 2006-04-29 18:04:04: Wafer is removed. Thanks Message-ID: