Problem stsetch SNF 2006-04-29 09:43:54: a wafer stuck in the chamber.Can't unload.
foxpp at snf.stanford.edu
foxpp at snf.stanford.edu
Sat Apr 29 09:43:55 PDT 2006
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Problem stsetch SNF 2006-04-23 18:35:07: load plate and beam vibrat
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Comment stsetch SNF 2006-04-29 18:04:04: Wafer is removed. Thanks
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Problem stsetch SNF 2006-04-23 18:35:07: load plate and beam vibrat
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Comment stsetch SNF 2006-04-29 18:04:04: Wafer is removed. Thanks
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