From tag at snf.stanford.edu Mon Feb 6 02:54:21 2006 From: tag at snf.stanford.edu (tag at snf.stanford.edu) Date: Mon, 6 Feb 2006 02:54:21 -0800 Subject: Shutdown stsetch SNF 2006-02-06 02:54:20: Wafer was broken Message-ID: Pieces of wafer are still inside of chamber. From cbaxter at snf.stanford.edu Mon Feb 6 09:20:18 2006 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Mon, 6 Feb 2006 09:20:18 -0800 Subject: Shutdown stsetch SNF 2006-02-06 02:54:20: Wafer was broken Message-ID: cleaned up broken wafer inside the chamber. noticed the edge of the broken wafer has resist residue that made the wafer stick on the chuck. From hanjun at snf.stanford.edu Mon Feb 13 20:17:21 2006 From: hanjun at snf.stanford.edu (hanjun at snf.stanford.edu) Date: Mon, 13 Feb 2006 20:17:21 -0800 Subject: Shutdown stsetch SNF 2006-02-13 20:17:20: loadlock fault Message-ID: unloading action of the loadlock was unstable, dropping the wafer inside the chamber. please retrieve the wafer. thank you! From eenriquez at snf.stanford.edu Mon Feb 13 22:26:52 2006 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 13 Feb 2006 22:26:52 -0800 Subject: Shutdown stsetch SNF 2006-02-13 20:17:20: loadlock fault Message-ID: Removed user's wafer and placed it on the PC behind the system. Found a little bit of resist on the the lip seal. Cleaned seal and ran O2 clean. Cycled wafers with no problems. From cbaxter at snf.stanford.edu Wed Feb 15 15:06:14 2006 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Wed, 15 Feb 2006 15:06:14 -0800 Subject: Shutdown stsetch SNF 2006-02-15 15:06:13: wafer handler not comunicatiing Message-ID: From cbaxter at snf.stanford.edu Thu Feb 16 20:14:16 2006 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Thu, 16 Feb 2006 20:14:16 -0800 Subject: Shutdown stsetch SNF 2006-02-15 15:06:13: wafer handler not comunicatiing Message-ID: Found one of the 12v battery was dead unable to energize the contact relay on the PSU1 module. Changed 12v battery and also recovered stuck wafer on chamber. I ran a 30mins o2 clean. From xzhuan1 at snf.stanford.edu Sat Feb 18 15:52:53 2006 From: xzhuan1 at snf.stanford.edu (xzhuan1 at snf.stanford.edu) Date: Sat, 18 Feb 2006 15:52:53 -0800 Subject: Problem stsetch SNF 2006-02-18 15:52:52: lock chamber pump down failure Message-ID: Wafer stuck in lock chamber. From cbaxter at snf.stanford.edu Mon Feb 20 20:49:27 2006 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Mon, 20 Feb 2006 20:49:27 -0800 Subject: Problem stsetch SNF 2006-02-18 15:52:52: lock chamber pump down failure Message-ID: pneumatic air to open the isolation valve is leaking, unable to open isolation valve causing wafer handler to lose communi- cation. repaired leaking quick disconnect valve and reboot the system. From sanli at snf.stanford.edu Tue Feb 21 11:23:37 2006 From: sanli at snf.stanford.edu (sanli at snf.stanford.edu) Date: Tue, 21 Feb 2006 11:23:37 -0800 Subject: Problem stsetch SNF 2006-02-21 11:23:36: wafer stuck in the lock chamber. HELP Message-ID: My wafer is stuck in the lock chamber. The lock chamber didn't vent after the process was complete. There was a lot of rattling in the lock chamber before this happened. From eenriquez at snf.stanford.edu Tue Feb 21 21:39:19 2006 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Tue, 21 Feb 2006 21:39:19 -0800 Subject: Problem stsetch SNF 2006-02-21 11:23:36: wafer stuck in the lock chamber. HELP Message-ID: Reset the computer and vented the loadlock. User's wafer is on top of the system's PC. Cycled dummy wafers. From xzhuan1 at snf.stanford.edu Wed Feb 22 17:49:54 2006 From: xzhuan1 at snf.stanford.edu (xzhuan1 at snf.stanford.edu) Date: Wed, 22 Feb 2006 17:49:54 -0800 Subject: Problem stsetch SNF 2006-02-22 17:49:54: icp communication error Message-ID: can't load wafer... From eenriquez at snf.stanford.edu Wed Feb 22 23:59:50 2006 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 22 Feb 2006 23:59:50 -0800 Subject: Problem stsetch SNF 2006-02-22 17:49:54: icp communication error Message-ID: Reset the system. Installed a second set of batteries in parallel with the existing set. From bchui at snf.stanford.edu Sat Feb 25 17:00:20 2006 From: bchui at snf.stanford.edu (bchui at snf.stanford.edu) Date: Sat, 25 Feb 2006 17:00:20 -0800 Subject: Problem stsetch SNF 2006-02-25 17:00:20: Flickering plasma Message-ID: Plasma is flickering, and arcing can be heard inside the match box. Further use not recommended. From eenriquez at snf.stanford.edu Sun Feb 26 09:53:31 2006 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Sun, 26 Feb 2006 09:53:31 -0800 Subject: Shutdown stsetch SNF 2006-02-26 09:53:30: Bad tuning capacitor Message-ID: Need to order tuning capacitor. From eenriquez at snf.stanford.edu Tue Feb 28 21:17:16 2006 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Tue, 28 Feb 2006 21:17:16 -0800 Subject: Shutdown stsetch SNF 2006-02-26 09:53:30: Bad tuning capacitor Message-ID: Replaced both tuning capacitors. Calibrated position of the plates. From eenriquez at snf.stanford.edu Tue Feb 28 21:17:28 2006 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Tue, 28 Feb 2006 21:17:28 -0800 Subject: Problem stsetch SNF 2006-02-25 17:00:20: Flickering plasma Message-ID: Replaced both tuning capacitors. Calibrated position of the plates.