Shutdown stsetch SNF 2006-02-06 02:54:20: Wafer was broken
tag at snf.stanford.edu
tag at snf.stanford.edu
Mon Feb 6 02:54:21 PST 2006
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Shutdown stsetch SNF 2006-02-06 02:54:20: Wafer was broken
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Pieces of wafer are still inside of chamber.
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Shutdown stsetch SNF 2006-02-06 02:54:20: Wafer was broken
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