Shutdown stsetch SNF 2006-02-06 02:54:20: Wafer was broken

cbaxter at snf.stanford.edu cbaxter at snf.stanford.edu
Mon Feb 6 09:20:18 PST 2006


cleaned up broken wafer inside the chamber.  noticed
the edge of the broken wafer has resist residue that made
the wafer stick on the chuck.




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