Shutdown stsetch SNF 2006-02-13 20:17:20: loadlock fault

eenriquez at snf.stanford.edu eenriquez at snf.stanford.edu
Mon Feb 13 22:26:52 PST 2006


Removed user's wafer and placed it on the PC behind the system.  Found a little bit of resist on the the lip seal.  Cleaned seal and ran O2 clean.  Cycled wafers with no problems.




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