Shutdown stsetch SNF 2006-02-13 20:17:20: loadlock fault
eenriquez at snf.stanford.edu
eenriquez at snf.stanford.edu
Mon Feb 13 22:26:52 PST 2006
Removed user's wafer and placed it on the PC behind the system. Found a little bit of resist on the the lip seal. Cleaned seal and ran O2 clean. Cycled wafers with no problems.
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