Shutdown stsetch SNF 2006-02-15 15:06:13: wafer handler not comunicatiing

cbaxter at cbaxter at
Thu Feb 16 20:14:16 PST 2006

Found one of the 12v battery was dead unable to
energize the contact relay on the PSU1 module. Changed 
12v battery and also recovered stuck wafer on chamber. I
ran a 30mins o2 clean.

More information about the stsetch-pcs mailing list