Shutdown stsetch SNF 2006-02-15 15:06:13: wafer handler not comunicatiing

cbaxter at snf.stanford.edu cbaxter at snf.stanford.edu
Thu Feb 16 20:14:16 PST 2006


Found one of the 12v battery was dead unable to
energize the contact relay on the PSU1 module. Changed 
12v battery and also recovered stuck wafer on chamber. I
ran a 30mins o2 clean.




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