Problem stsetch SNF 2006-02-18 15:52:52: lock chamber pump down failure
xzhuan1 at snf.stanford.edu
xzhuan1 at snf.stanford.edu
Sat Feb 18 15:52:53 PST 2006
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Problem stsetch SNF 2006-02-18 15:52:52: lock chamber pump down failure
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Wafer stuck in lock chamber.
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Shutdown stsetch SNF 2006-02-15 15:06:13: wafer handler not comunicatiing
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Problem stsetch SNF 2006-02-18 15:52:52: lock chamber pump down failure
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