Problem stsetch SNF 2006-02-18 15:52:52: lock chamber pump down failure

cbaxter at snf.stanford.edu cbaxter at snf.stanford.edu
Mon Feb 20 20:49:27 PST 2006


pneumatic air to open the isolation valve is leaking, unable to
open isolation valve causing wafer handler to lose communi-
cation. repaired leaking quick disconnect valve and reboot
the system.




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