Problem stsetch SNF 2006-02-21 11:23:36: wafer stuck in the lock chamber. HELP

sanli at snf.stanford.edu sanli at snf.stanford.edu
Tue Feb 21 11:23:37 PST 2006


My wafer is stuck in the lock chamber. The lock chamber didn't vent after the process was complete. There was a lot of rattling in the lock chamber before this happened.




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