Problem stsetch SNF 2006-02-21 11:23:36: wafer stuck in the lock chamber. HELP

eenriquez at snf.stanford.edu eenriquez at snf.stanford.edu
Tue Feb 21 21:39:19 PST 2006


Reset the computer and vented the loadlock.  User's wafer is on top of the system's PC.  Cycled dummy wafers.




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