Shutdown stsetch SNF 2006-06-22 16:07:59: No RF, loadlock doesn't pumpdown

latta at snf.stanford.edu latta at snf.stanford.edu
Thu Jun 22 16:08:07 PDT 2006

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My wafer is still in the chamber.
Unspecified fault- got the fault screen, but it only said interlock tripped....

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