Shutdown stsetch SNF 2006-06-22 16:07:59: No RF, loadlock doesn't pumpdown

latta at snf.stanford.edu latta at snf.stanford.edu
Thu Jun 22 16:08:07 PDT 2006


My wafer is still in the chamber.
Unspecified fault- got the fault screen, but it only said interlock tripped....




More information about the stsetch-pcs mailing list