Problem stsetch SNF 2006-03-01 01:34:13: Wafer is stuck inside the chamber.

tag at snf.stanford.edu tag at snf.stanford.edu
Wed Mar 1 01:34:14 PST 2006


"Platen power out of tolerance" error is coming out, then
"serial comunication fault". The wafer is still inside.




More information about the stsetch-pcs mailing list