Problem stsetch SNF 2006-03-06 16:30:55: load lock won't vent

mislam at snf.stanford.edu mislam at snf.stanford.edu
Mon Mar 6 16:30:56 PST 2006

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Serial communication failure while venting load lock.
Wafer in the load lock, cann't vent.

Previous message: Problem stsetch SNF 2006-03-01 01:34:13: Wafer is stuck inside the chamber.
Next message: Problem stsetch SNF 2006-03-06 16:30:55: load lock won't vent
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