Problem stsetch SNF 2006-03-06 16:30:55: load lock won't vent

eenriquez at eenriquez at
Mon Mar 6 22:32:11 PST 2006

Reset the system. Found one of the battery leads disconnected from the terminal.  Reconnected battery.  Also saw wafer chips on the chuck. Clean chips chamber and ran O2 clean.

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