Problem stsetch SNF 2006-03-06 16:30:55: load lock won't vent

eenriquez at snf.stanford.edu eenriquez at snf.stanford.edu
Mon Mar 6 22:32:11 PST 2006

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Reset the system. Found one of the battery leads disconnected from the terminal.  Reconnected battery.  Also saw wafer chips on the chuck. Clean chips chamber and ran O2 clean.

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