Problem stsetch SNF 2006-03-06 16:30:55: load lock won't vent

eenriquez at snf.stanford.edu eenriquez at snf.stanford.edu
Mon Mar 6 22:32:11 PST 2006


Reset the system. Found one of the battery leads disconnected from the terminal.  Reconnected battery.  Also saw wafer chips on the chuck. Clean chips chamber and ran O2 clean.




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