Shutdown stsetch SNF 2006-03-09 15:02:31: serial communication error: again

sanli at snf.stanford.edu sanli at snf.stanford.edu
Thu Mar 9 15:02:32 PST 2006


This time it is really scary. While there was still 40 minutes
left in my process, the transfer arm attempted to remove
my wafer from the process chamber. Of course, the door was
locked, but as of now, the transfer arm is still trying to get
in the process chamber. Please help, my wafers is inside the
process chamber, and the machine is very very confused.




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